Opto-numerical analysis of AIN piezoelectric thin film operating as an actuation layer in MEMS cantilevers
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APA-like:
Tác giả chưa xác định. Opto-numerical analysis of AIN piezoelectric thin film operating as an actuation layer in MEMS cantilevers. Thesis, HAL - Pháp.
Việt Nam (chuẩn TCVN 5453:1991):
. Opto-numerical analysis of AIN piezoelectric thin film operating as an actuation layer in MEMS cantilevers. Thesis. HAL - Pháp. Truy cập từ .
Tóm tắt
The goal of this Ph.D. thesis is the analysis and the determination of the properties of aluminium nitride (AlN) piezoelectric thin film operating as an actuation layer within bimorph microcantilevers and the evaluation of their micromechanical performances. The research described in this thesis was accomplished with the use of a hybrid methodology combining the optical interferometry, the techniques of nanoindentation, the numerical simulations as well as the analytical considerations meaning t...